Design and analysis of a cantilever-based MEMS switch with dielectric thin film material coatings for enhanced electrostatic actuation. uri icon

authors

  • Saxena, Ankur
  • Yadav, Chandrmani
  • Shata, Pratikkumar S
  • Singh, Raghvendra
  • Ezhilarasan, G
  • Manish Kumar, MD
  • Verma, Shubham Kumar
  • Patil, Shantharam

publication date

  • July 15, 2026